Invention Grant
- Patent Title: Gate valve device, cleaning method and mechanical apparatus
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Application No.: US17453847Application Date: 2021-11-06
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Publication No.: US11933416B2Publication Date: 2024-03-19
- Inventor: Zhengzheng Wang , Liuguang Wang , Hongyang Wang , Jianqiao Yao
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN 2110808805.9 2021.07.16
- Main IPC: F16K3/30
- IPC: F16K3/30 ; B08B5/04 ; B08B13/00 ; F16K3/02 ; F16K3/06 ; F16K31/44 ; H01L21/67
Abstract:
A gate valve device includes a cleaning component, a first lifting component, and a second lifting component. The cleaning component is arranged on the second lifting component. The first lifting component is configured to control whether an opening on a side of a vacuum chamber close to a swing gate valve is in a closed state. The second lifting component is configured to, in a case that the opening on the side of the vacuum chamber close to the swing gate valve is in the closed state, control the cleaning component to clean the swing gate valve.
Public/Granted literature
- US20230015887A1 GATE VALVE DEVICE, CLEANING METHOD AND MECHANICAL APPARATUS Public/Granted day:2023-01-19
Information query
