Invention Grant
- Patent Title: MEMS capacitive sensor including improved contact separation
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Application No.: US17420953Application Date: 2020-03-26
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Publication No.: US11933689B2Publication Date: 2024-03-19
- Inventor: Heribert Weber , Christoph Hermes , Hans Artmann , Peter Schmollngruber , Thomas Friedrich , Volkmar Senz
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: NORTON ROSE FULBRIGHT US LLP
- Agent Gerard A. Messina
- Priority: DE 2019205346.7 2019.04.12
- International Application: PCT/EP2020/058541 2020.03.26
- International Announcement: WO2020/207810A 2020.10.15
- Date entered country: 2021-07-06
- Main IPC: G01L9/12
- IPC: G01L9/12 ; G01L19/00 ; G01L19/06

Abstract:
A sensor device having a first counter electrode extending under an intermediate carrier, and having a first distance between the intermediate carrier and the first counter electrode being modifiable by the pressure on the movable region, and the first counter electrode encompassing, under the intermediate carrier, at least one electrically separated region that is disposed below a spacing element and includes at least a lateral extent of the spacing element.
Public/Granted literature
- US20220090975A1 SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE Public/Granted day:2022-03-24
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