Invention Grant
- Patent Title: Inertial sensor
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Application No.: US17658139Application Date: 2022-04-06
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Publication No.: US11933809B2Publication Date: 2024-03-19
- Inventor: Shih-Wei Lee , Chia-Hao Lin , Shih-Hsiung Tseng , Kuan-Ju Tseng , Chao-Shiun Wang
- Applicant: SENSORTEK TECHNOLOGY CORP.
- Applicant Address: TW Zhubei
- Assignee: SENSORTEK TECHNOLOGY CORP.
- Current Assignee: SENSORTEK TECHNOLOGY CORP.
- Current Assignee Address: TW Zhubei
- Agency: ROSENBERG, KLEIN & LEE
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01P15/125 ; G01P15/18

Abstract:
The present application discloses an inertial sensor comprising a proof mass, an anchor, a flexible member and several sensing electrodes. The anchor is positioned on one side of the sensing, mass block in a first axis. The flexible member is connected to the anchor point and extends along the first axis towards the proof mass to connect the proof mass, in which the several sensing electrodes are provided. In this way, the present application can effectively solve the problems of high difficulty in the production and assembly of inertial sensors and poor product reliability thereof.
Public/Granted literature
- US20230055638A1 INERTIAL SENSOR Public/Granted day:2023-02-23
Information query
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