Invention Grant
- Patent Title: Memory array and methods used in forming a memory array
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Application No.: US17746649Application Date: 2022-05-17
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Publication No.: US11937423B2Publication Date: 2024-03-19
- Inventor: Luan C. Tran , Guangyu Huang , Haitao Liu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- The original application number of the division: US16288982 2019.02.28
- Main IPC: H10B41/27
- IPC: H10B41/27 ; G11C5/06 ; H10B41/35 ; H10B41/60 ; H10B43/27 ; H10B43/35

Abstract:
A method used in forming a memory array, comprises forming a substrate comprising a conductive tier, an insulator etch-stop tier above the conductive tier, a select gate tier above the insulator etch-stop tier, and a stack comprising vertically-alternating insulative tiers and wordline tiers above the select gate tier. Etching is conducted through the insulative tiers, the wordline tiers, and the select gate tier to and stopping on the insulator etch-stop tier to form channel openings that have individual bottoms comprising the insulator etch-stop tier. The insulator etch-stop tier is penetrated through to extend individual of the channel openings there-through to the conductive tier. Channel material is formed in the individual channel openings elevationally along the insulative tiers, the wordline tiers, and the select gate tier and is directly electrically coupled with the conductive material in the conductive tier. Structure independent of method is disclosed.
Public/Granted literature
- US20220278120A1 Memory Array and Methods Used in Forming a Memory Array Public/Granted day:2022-09-01
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