Invention Grant
- Patent Title: Silicone-based adhesive sheet, multilayer structure including same, and method for producing semiconductor device
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Application No.: US16955209Application Date: 2018-12-19
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Publication No.: US11939497B2Publication Date: 2024-03-26
- Inventor: Nohno Toda , Manabu Sutoh
- Applicant: DOW TORAY CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: DOW TORAY CO., LTD.
- Current Assignee: DOW TORAY CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Warner Norcross + Judd LLP
- Priority: JP 17243335 2017.12.20
- International Application: PCT/JP2018/046702 2018.12.19
- International Announcement: WO2019/124417A 2019.06.27
- Date entered country: 2020-06-18
- Main IPC: C09J183/04
- IPC: C09J183/04 ; B32B27/08 ; B32B27/28 ; C08G77/12 ; C08G77/20 ; C09J7/35 ; C09J11/06 ; H01L21/683 ; H01L21/78

Abstract:
Provided is: a layered body wherein a sheet surface has slight adhesiveness, enabling easy temporary securing of a semiconductor chip, or the like, that has been diced, onto a semiconductor substrate, and wherein permanent adhesion to an adhered object is expressed through post-curing; a layered body that includes the same; a semiconductor device that uses the same; and a method for manufacturing the semiconductor device. A silicone-based adhesive sheet is disclosed herein, wherein, prior to heating, the delamination mode of the adhesive surface from a non-adhesive substrate is interfacial delamination, and after heating of the adhesive surface in a range of between 50 and 200° C., the delamination mode of the adhesive surface from another non-adhesive substrate changes to cohesive fracturing, and exhibits permanent adhesion.
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