Invention Grant
- Patent Title: Ultralight robust plate materials
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Application No.: US17541681Application Date: 2021-12-03
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Publication No.: US11939672B2Publication Date: 2024-03-26
- Inventor: Igor Bargatin , Keivan Davami
- Applicant: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA
- Applicant Address: US PA Philadelphia
- Assignee: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA
- Current Assignee: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA
- Current Assignee Address: US PA Philadelphia
- Agency: Baker Bolts L.L.P.
- The original application number of the division: US16787733 2020.02.11
- Main IPC: H01L21/3065
- IPC: H01L21/3065 ; C23C16/01 ; C23C16/12 ; C23C16/455 ; C23C16/50 ; H01J37/32

Abstract:
A nanoscale plate structure includes base plates and rib plates with nanoscale thickness and macroscopic lateral dimensions. The base plate resides in the first plane, the ribs can reside out-of-plane and form at least one strengthening rib, and additional base plates can reside in planes parallel to the first plane. The strengthening rib can be patterned such that there is no straight line path extending through a lateral dimension of the plate structure that does not intersect the at least one base plate and the at least one strengthening rib. The plates and ribs used in the structure have a thickness between about 1 nm and about 100 nm. The plate structures can be fabricated using a conformal deposition method including atomic layer deposition.
Public/Granted literature
- US20220154334A1 ULTRALIGHT ROBUST PLATE MATERIALS Public/Granted day:2022-05-19
Information query
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