Invention Grant
- Patent Title: Micromechanical pressure sensor device and a corresponding production method
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Application No.: US17291244Application Date: 2019-12-13
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Publication No.: US11940346B2Publication Date: 2024-03-26
- Inventor: Johannes Meckbach , Thomas Friedrich
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: NORTON ROSE FULBRIGHT US LLP
- Agent Gerard A. Messina
- Priority: DE 2018222738.1 2018.12.21
- International Application: PCT/EP2019/085105 2019.12.13
- International Announcement: WO2020/126915A 2020.06.25
- Date entered country: 2021-05-04
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B3/00

Abstract:
A micromechanical pressure sensor device including a semiconductor base substrate of a first doping type on which an intermediate layer of the first doping type is situated, a cavity sealed by a sealing layer of a second doping type and including a reference pressure, a first grating of the second doping type, suspended inside the cavity on a buried connection region of the second doping type, the buried connection region laterally extending away from the cavity into the semiconductor base material, a second grating of the second doping type, situated on a side of the diaphragm region pointing to the cavity and suspended on the diaphragm region, the first grating and the second grating being electrically insulated from each other and forming a capacitance, a first connection electrically connected to the first grating via the buried connection region, and a second connection electrically connected to the second grating.
Public/Granted literature
- US20210389202A1 MICROMECHANICAL PRESSURE SENSOR DEVICE AND A CORRESPONDING PRODUCTION METHOD Public/Granted day:2021-12-16
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