Invention Grant
- Patent Title: Probe station capable of maintaining stable and accurate contact to device under test
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Application No.: US17805027Application Date: 2022-06-01
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Publication No.: US11940486B2Publication Date: 2024-03-26
- Inventor: Yi-Kai Chao
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: CKC & Partners Co., LLC
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
A probe station includes a frame, a platform, a testing equipment, a probe holder and at least one probe. The frame defines an accommodation space. The platform is connected with the frame. The platform has an opening. The opening is communicated with the accommodation space. The testing equipment is at least partially disposed in the accommodation space and is at least partially exposed through the opening. The probe holder is disposed on the platform. The probe is held by the probe holder. The probe holder is configured to control the probe to contact with a device under test disposed on the testing equipment through the opening.
Public/Granted literature
- US20230393191A1 PROBE STATION Public/Granted day:2023-12-07
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