Invention Grant
- Patent Title: Thermal solution for massively parallel testing
-
Application No.: US18094899Application Date: 2023-01-09
-
Publication No.: US11940487B2Publication Date: 2024-03-26
- Inventor: Samer Kabbani , Kazuyuki Yamashita , Ikeda Hiroki , Ira Leventhal , Mohammad Ghazvini , Paul Ferrari , Karthik Ranganathan , Gregory Cruzan , Gilberto Oseguera
- Applicant: Advantest Test Solutions, Inc.
- Applicant Address: US CA San Jose
- Assignee: Advantest Test Solutions, Inc.
- Current Assignee: Advantest Test Solutions, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
An apparatus for thermal control of a device under test (DUT) includes a cooling structure operable to provide cooling, the cooling structure operable to inlet cooling material via an inlet port thereof and operable to outlet cooling material via an outlet port thereof, a variable thermal conductance material (VTCM) layer disposed on a surface of the cooling structure, and a heater layer operable to generate heat based on an electronic control, and wherein the VTCM layer is operable to transfer cooling from the cooling structure to the heater layer. A thermal interface material layer is disposed on the heater layer. The thermal interface material layer is operable to provide thermal coupling and mechanical compliance with respect to the DUT. The apparatus includes a compression mechanism for providing compression to the VTCM layer to vary a thermal conductance of the VTCM layer. The compression mechanism is also for decoupling the VTCM layer from the heater layer.
Public/Granted literature
- US20230228812A1 THERMAL SOLUTION FOR MASSIVELY PARALLEL TESTING Public/Granted day:2023-07-20
Information query