Invention Grant
- Patent Title: Method of making a quantum device
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Application No.: US17456388Application Date: 2021-11-24
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Publication No.: US11941485B2Publication Date: 2024-03-26
- Inventor: Nicolas Posseme , Louis Hutin , Cyrille Le Royer , François Lefloch , Fabrice Nemouchi , Maud Vinet
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR 12305 2020.11.27
- Main IPC: H01L21/32
- IPC: H01L21/32 ; G06N10/00 ; H01L21/76 ; H01L29/66 ; H10N60/01 ; H10N60/10

Abstract:
A method for producing a quantum device comprising providing a substrate having a front face and carrying at least one transistor pattern on the front face thereof, said transistor pattern comprising, in a stack a gate dielectric on the front face of the substrate, and a gate on the gate dielectric, said gate having a top and sidewalls. The method further includes forming a protective layer at the front face of the substrate, said protective layer being configured to prevent diffusion of at least one metal species in the substrate, forming a metal layer that has, as a main component, at least one metal species, at least on the sidewalls of the gate, said at least one metal species comprising at least one superconducting element, and forming a superconducting region in the gate by lateral diffusion of the at least one superconducting element from the sidewalls of said gate.
Public/Granted literature
- US20220172093A1 METHOD OF MAKING A QUANTUM DEVICE Public/Granted day:2022-06-02
Information query
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