Invention Grant
- Patent Title: Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device
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Application No.: US17616585Application Date: 2020-05-13
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Publication No.: US11942517B2Publication Date: 2024-03-26
- Inventor: Takeyoshi Masuda
- Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JP 19107907 2019.06.10
- International Application: PCT/JP2020/019061 2020.05.13
- International Announcement: WO2020/250612A 2020.12.17
- Date entered country: 2021-12-03
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/02 ; H01L29/16

Abstract:
A silicon carbide semiconductor device has a silicon carbide substrate, a first insulator, a first electrode, and a second electrode. The silicon carbide substrate includes a first impurity region, a second impurity region, a third impurity region, a first superjunction portion, a fourth impurity region, a fifth impurity region, a sixth impurity region, and a second superjunction portion. The first superjunction portion has a first region and a second region. The second superjunction portion has a third region and a fourth region. In a direction perpendicular to a second main surface, a bottom surface of a first trench is located between a second end surface and the second main surface and is located between a fourth end surface and the second main surface.
Public/Granted literature
- US20220246730A1 SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE Public/Granted day:2022-08-04
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