Invention Grant
- Patent Title: Semiconductor device including transistor including horizontal gate structure and vertical channel layer and method for fabricating the same
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Application No.: US17481479Application Date: 2021-09-22
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Publication No.: US11942544B2Publication Date: 2024-03-26
- Inventor: Young Gwang Yoon
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T GROUP LLP
- Priority: KR 20210045308 2021.04.07
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/10 ; H01L29/423 ; H01L29/66

Abstract:
A semiconductor device includes: a first stacked structure including a first lower dielectric layer, a first horizontal gate structure, and a first upper dielectric layer stacked vertically; a second stacked structure including a second lower dielectric layer, a second horizontal gate structure, and a second upper dielectric layer stacked vertically, and having a first side facing a first side of the first stacked structure; a first channel layer formed on the first side of the first stacked structure; a second channel layer formed on the first side of the second stacked structure; a lower electrode layer commonly coupled to lower ends of the first and second channel layers between the first and second stacked structures; a first upper electrode layer coupled to an upper end of the first channel layer; and a second upper electrode layer coupled to an upper end of the second channel layer.
Public/Granted literature
- US20220328687A1 SEMICONDUCTOR DEVICE INCLUDING TRANSISTOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-10-13
Information query
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