Invention Grant
- Patent Title: MEMS microphone
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Application No.: US17715278Application Date: 2022-04-07
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Publication No.: US11943584B2Publication Date: 2024-03-26
- Inventor: Chih-Yuan Chen , Jien-Ming Chen , Feng-Chia Hsu , Wen-Shan Lin , Nai-Hao Kuo
- Applicant: Fortemedia, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: FORTEMEDIA, INC.
- Current Assignee: FORTEMEDIA, INC.
- Current Assignee Address: US CA Alviso
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B3/00 ; H04R7/04 ; H04R7/16

Abstract:
A micro-electro-mechanical system (MEMS) microphone is provided. The MEMS microphone includes a substrate, a diaphragm, a backplate and a first protrusion. The substrate has an opening portion. The diaphragm is disposed on one side of the substrate and extends across the opening portion of the substrate. The backplate includes a plurality of acoustic holes. The backplate is disposed on one side of the diaphragm. An air gap is formed between the backplate and the diaphragm. The first protrusion extends from the backplate towards the air gap.
Public/Granted literature
- US20230063234A1 MEMS MICROPHONE Public/Granted day:2023-03-02
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