- Patent Title: Three-dimensional memory devices and fabrication methods thereof
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Application No.: US16541137Application Date: 2019-08-14
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Publication No.: US11943923B2Publication Date: 2024-03-26
- Inventor: Li Hong Xiao
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Priority: CN 1910248585.1 2019.03.29 CN 1910248601.7 2019.03.29 CN 1910248617.8 2019.03.29 CN 1910248966.X 2019.03.29 CN 1910248967.4 2019.03.29
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L21/02 ; H01L21/28 ; H01L21/306 ; H01L21/311 ; H01L21/768 ; H10B43/27

Abstract:
Embodiments of methods to form three-dimensional (3D) memory devices include the following operations. First, an initial channel hole is formed in a stack structure of a plurality first layers and a plurality of second layers alternatingly arranged over a substrate. An offset is formed between a side surface of each one of the plurality of first layers and a side surface of each one of the plurality of second layers on a sidewall of the initial channel hole to form a channel hole. A semiconductor channel is formed by filling the channel hole with a channel-forming structure, the semiconductor channel having a memory layer including a plurality of first memory portions each surrounding a bottom of a respective second layer and a plurality of second memory portions each connecting adjacent first memory portions.
Public/Granted literature
- US20200312869A1 THREE-DIMENSIONAL MEMORY DEVICES AND FABRICATION METHODS THEREOF Public/Granted day:2020-10-01
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