Invention Grant
- Patent Title: Using aluminum as etch stop layer
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Application No.: US17127462Application Date: 2020-12-18
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Publication No.: US11944020B2Publication Date: 2024-03-26
- Inventor: Sundar Narayanan , Natividad Vasquez , Zhen Gu , Yunyu Wang
- Applicant: Crossbar, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: CROSSBAR, INC.
- Current Assignee: CROSSBAR, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Wegman, Hessler, Valore
- The original application number of the division: US15468847 2017.03.24
- Main IPC: H10N70/00
- IPC: H10N70/00 ; H10N70/20

Abstract:
A two-terminal resistive switching device (TTRSD) such as a non-volatile two-terminal memory device or a volatile two-terminal selector device can be formed according to a manufacturing process. The process can include forming an etch stop layer that is made of aluminum and can include forming a buffer layer below the etch stop layer and/or between the etch stop layer and a top electrode of the TTRSD.
Public/Granted literature
- US20210151671A1 USING ALUMINUM AS ETCH STOP LAYER Public/Granted day:2021-05-20
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