Invention Grant
- Patent Title: Processing apparatus
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Application No.: US17166240Application Date: 2021-02-03
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Publication No.: US11945074B2Publication Date: 2024-04-02
- Inventor: Nobuyuki Fukushi
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP 20024140 2020.02.17
- Main IPC: B24B49/04
- IPC: B24B49/04 ; B24B5/02 ; B24B5/313 ; B24B7/22 ; B24B51/00 ; H01L21/304 ; H01L21/687

Abstract:
A processing apparatus includes a chuck table for holding a workpiece that has a mark representing a crystal orientation, a processing unit, a cassette stage for placing thereon a cassette for storing a plurality of workpieces therein, a temporary rest table, a spinner table, a robot for delivering a workpiece, a determining section for determining whether a workpiece has been properly processed or has not been properly processed, and a control unit for performing a control process for orienting the mark of the workpiece in a predetermined direction if the determining section determines that the workpiece has been properly processed and storing the workpiece in the cassette, and performing a control process for orienting the mark of the workpiece in a direction different from the predetermined direction if the determining section determines that the workpiece has not been properly processed and storing the workpiece in the cassette.
Public/Granted literature
- US20210252661A1 PROCESSING APPARATUS Public/Granted day:2021-08-19
Information query
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