- Patent Title: Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method
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Application No.: US16467472Application Date: 2018-03-13
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Publication No.: US11946470B2Publication Date: 2024-04-02
- Inventor: Keiji Maishigi , Tetsuro Sugiura , Katsuaki Usui , Masahiro Hatakeyama , Chikako Honma , Toru Osuga , Koichi Iwasaki , Jie Yuan Lin
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP 17052189 2017.03.17 JP 17098691 2017.05.18 JP 17098899 2017.05.18 JP 17177611 2017.09.15 JP 18016875 2018.02.02
- International Application: PCT/JP2018/009681 2018.03.13
- International Announcement: WO2018/168838A 2018.09.20
- Date entered country: 2019-06-06
- Main IPC: F04C28/28
- IPC: F04C28/28 ; F04D27/00 ; G06F9/54 ; G06F17/18
Abstract:
An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including:
a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and
a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.
a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and
a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.
Information query
