Invention Grant
- Patent Title: Method for determining the thermal donor concentration of a semiconductor sample
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Application No.: US17276040Application Date: 2019-09-13
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Publication No.: US11946869B2Publication Date: 2024-04-02
- Inventor: Torbjørn Mehl , Espen Olsen , Ingunn Burud , Lisa Kvalbein , Elénore Letty , Wilfried Favre , Jordi Veirman
- Applicant: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES , NORWEGIAN UNIVERSITY OF LIFE SCIENCES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,NORWEGIAN UNIVERSITY OF LIFE SCIENCES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,NORWEGIAN UNIVERSITY OF LIFE SCIENCES
- Current Assignee Address: FR Paris; NO Ås
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP 306196 2018.09.14
- International Application: PCT/EP2019/074537 2019.09.13
- International Announcement: WO2020/053413A 2020.03.19
- Date entered country: 2021-03-12
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G01N21/95

Abstract:
A method for determining the thermal donor concentration of a test sample made of a semiconductor material, includes providing a reference sample made of the same semiconductor material and having a known thermal donor concentration; measuring a photoluminescence signal of the reference sample for a photon energy comprised between 0.65 eV and 0.8 eV, the photoluminescence signal of the reference sample exhibiting an intensity peak in a photon energy range of 0.65 eV to 0.8 eV; determining, from the photoluminescence signal, an experimental relationship between the thermal donor concentration and a parameter representative of the intensity peak; measuring a photoluminescence signal of the test sample for at least one photon energy comprised between 0.65 eV and 0.8 eV; determining from the photoluminescence signal a specific value of the parameter; and determining the thermal donor concentration from the specific value of the parameter by using the experimental relationship.
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