Invention Grant
- Patent Title: Semiconductor Mach Zehnder optical modulator
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Application No.: US17420004Application Date: 2020-01-08
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Publication No.: US11947237B2Publication Date: 2024-04-02
- Inventor: Josuke Ozaki , Hiromasa Tanobe , Shigeru Kanazawa
- Applicant: Nippon Telegraph and Telephone Corporation
- Applicant Address: JP Tokyo
- Assignee: Nippon Telegraph and Telephone Corporation
- Current Assignee: Nippon Telegraph and Telephone Corporation
- Current Assignee Address: JP Tokyo
- Agency: Slater Matsil, LLP
- Priority: JP 19005050 2019.01.16
- International Application: PCT/JP2020/000249 2020.01.08
- International Announcement: WO2020/149185A 2020.07.23
- Date entered country: 2021-06-30
- Main IPC: G02F1/21
- IPC: G02F1/21 ; G02F1/225

Abstract:
A semiconductor Mach-Zehnder optical modulator includes input side lead-out lines, phase modulation electrode lines, output side lead-out lines, electrodes that apply modulation signals propagating through the phase modulation electrode lines to respective waveguides, and ground lines. Furthermore, at least one n-type semiconductor layer or p-type semiconductor layer is formed between a substrate and a dielectric layer in a lower layer under the output side lead-out lines intermittently along the output side lead-out lines.
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