Invention Grant
- Patent Title: Optical diffraction component
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Application No.: US17673966Application Date: 2022-02-17
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Publication No.: US11947265B2Publication Date: 2024-04-02
- Inventor: Heiko Feldmann
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE 2019213063.1 2019.08.30
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G02B5/08 ; G02B5/18

Abstract:
An optical diffraction component has a periodic grating structure profile. The diffraction structure levels are arranged so that a wavelength range around two different target wavelengths diffracted by the grating structure profile has radiation components with three different phases that interfere destructively with one another. Diffraction structure levels predefine a topography of a grating period of the grating structure profile that is repeated regularly along a period running direction. These include a neutral diffraction structure level, a positive diffraction structure level raised relative thereto, and a negative diffraction structure level lowered relative thereto. The neutral diffraction structure level has an extent along the period running direction which is less than 50% of the extent of the grating period. A difference between the two target wavelengths is less than 50%. The result is an optical diffraction component whose possibilities for use can be extended, for example, to stray light suppression.
Public/Granted literature
- US20220171292A1 OPTICAL DIFFRACTION COMPONENT Public/Granted day:2022-06-02
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