Invention Grant
- Patent Title: Lithographic systems and methods of operating the same
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Application No.: US18074600Application Date: 2022-12-05
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Publication No.: US11947271B2Publication Date: 2024-04-02
- Inventor: Jeroen de Boeij , Mikhail Yurievich Loktev
- Applicant: Kulicke & Soffa Liteq B.V.
- Applicant Address: NL Eindhoven
- Assignee: Kulicke & Soffa Liteq B.V.
- Current Assignee: Kulicke & Soffa Liteq B.V.
- Current Assignee Address: NL Eindhoven
- Agent Christopher M. Spletzer, Sr.
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
A lithographic system for projecting an image onto a workpiece using radiation is provided. The lithographic system includes: a support structure for supporting a workpiece; a radiation source for providing radiation to project an image on the workpiece; a reticle positioned between the radiation source and the workpiece; and a mask positioned adjacent the reticle, the mask being configured to block radiation from the radiation source, the mask including a heat removal apparatus.
Public/Granted literature
- US20230095872A1 LITHOGRAPHIC SYSTEMS AND METHODS OF OPERATING THE SAME Public/Granted day:2023-03-30
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