Invention Grant
- Patent Title: Mold for making alkali metal wax packet, method for preparing same, and method for using same
-
Application No.: US17780675Application Date: 2020-11-26
-
Publication No.: US11947321B2Publication Date: 2024-04-02
- Inventor: Xinghui Li , Ting Du , Haijun Chen , Zhongzheng Liu , Shunlu Xiao
- Applicant: BEIJING VACUUM ELECTONICS RESEARCH INSTITUTE
- Applicant Address: CN Beijing
- Assignee: BEIJING VACUUM ELECTONICS RESEARCH INSTITUTE
- Current Assignee: BEIJING VACUUM ELECTONICS RESEARCH INSTITUTE
- Current Assignee Address: CN Beijing
- Agency: RANKIN, HILL & CLARK LLP
- Priority: CN 1911195820.X 2019.11.28
- International Application: PCT/CN2020/131785 2020.11.26
- International Announcement: WO2021/104375A 2021.06.03
- Date entered country: 2022-05-27
- Main IPC: G04D3/00
- IPC: G04D3/00 ; G04F5/14

Abstract:
Disclosed are a mold assembly for making alkali metal wax packets, a method for preparing same, and a method for using same. The mold assembly comprises a silicon substrate (10), the silicon substrate (10) comprising a mold isolator (11) at the edge of the silicon substrate (10) and a silicon substrate central portion (18). The upper surface of the silicon substrate central portion (18) is indented to form a plurality of wax packet receiving cavities (12). A cavity isolator (13) locates between adjacent wax packet receiving cavities (12). A release sacrificial layer (15) is formed on the upper surface of the silicon substrate (10), and a paraffin layer (16) is formed on the upper surface of the release sacrificial layer (15) away from the silicon substrate (10). Cavities (121) for containing alkali metal are formed on a side of the paraffin layer (16) away from the release sacrificial layer (15). The mold isolator (11) is provided with corrosion release holes (14). The mold assembly can reliably and controllably achieve batch production of uniform alkali metal wax packet arrays and is completely compatible with MEMS and microelectronic processes, with simple processes that can be easily implemented and high operability. The wax packet mold assembly can be reused, such that wasting of raw materials can be avoided, and the cost of batch production can be effectively reduced.
Public/Granted literature
- US20230139149A1 MOLD FOR MAKING ALKALI METAL WAX PACKET, METHOD FOR PREPARING SAME, AND METHOD FOR USING SAME Public/Granted day:2023-05-04
Information query