Invention Grant
- Patent Title: Control system, control method, recording medium storing control program, and processing system
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Application No.: US17101739Application Date: 2020-11-23
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Publication No.: US11948782B2Publication Date: 2024-04-02
- Inventor: Ryuta Higuchi
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JP 19213379 2019.11.26
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G05B13/04 ; G05B17/00 ; G05B19/418

Abstract:
A control system includes: a specifying part for specifying a model corresponding to a processing apparatus and a control algorithm that generates a control signal for controlling the processing apparatus; a simulator for simulating the state of the processing apparatus with the model; a first control signal generation part for generating a control signal based on the measurement value by using the control algorithm; a second control signal generation part for generating a control signal based on an output value of the simulator by using the control algorithm; a first adjustment part for adjusting a value of a model parameter included in the model; and a second adjustment part for adjusting a value of a control parameter included in the control algorithm so that an evaluation value calculated for the output value of the simulator becomes closer to a target value.
Public/Granted literature
- US20210159059A1 CONTROL SYSTEM, CONTROL METHOD, RECORDING MEDIUM STORING CONTROL PROGRAM, AND PROCESSING SYSTEM Public/Granted day:2021-05-27
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