- Patent Title: Etch barrier for microelectronic packaging conductive structures
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Application No.: US16413943Application Date: 2019-05-16
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Publication No.: US11948898B2Publication Date: 2024-04-02
- Inventor: Kristof Darmawikarta , Srinivas V. Pietambaram , Hongxia Feng , Xiaoying Guo , Benjamin T. Duong
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/66
- IPC: H01L23/66 ; H01L21/768 ; H01L23/528 ; H01L23/532

Abstract:
Conductive structures in a microelectronic package and having a surface roughness of 50 nm or less are described. This surface roughness is from 2 to 4 times less than can be found in packages with conductive structures (e.g., traces) formed using alternative techniques. This reduced surface roughness has a number of benefits, which in some cases includes a reduction of insertion loss and improves a signal to noise ratio for high frequency computing applications. The reduced surface roughness can be accomplished by protecting the conductive structure r during etch processes and applying an adhesion promoting layer to the conductive structure.
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