Invention Grant
- Patent Title: Recessed gate for an MV device
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Application No.: US17866870Application Date: 2022-07-18
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Publication No.: US11948938B2Publication Date: 2024-04-02
- Inventor: Yi-Huan Chen , Chien-Chih Chou , Ta-Wei Lin , Hsiao-Chin Tuan , Alexander Kalnitsky , Kong-Beng Thei , Shi-Chuang Hsiao , Yu-Hong Kuo
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US16412852 2019.05.15
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/088 ; H01L29/423 ; H01L29/66

Abstract:
In some embodiments, the present disclosure relates to a semiconductor device comprising a source and drain region arranged within a substrate. A conductive gate is disposed over a doped region of the substrate. A gate dielectric layer is disposed between the source region and the drain region and separates the conductive gate from the doped region. A bottommost surface of the gate dielectric layer is below a topmost surface of the substrate. First and second sidewall spacers are arranged along first and second sides of the conductive gate, respectively. An inner portion of the first sidewall spacer and an inner portion of the second sidewall spacer respectively cover a first and second top surface of the gate dielectric layer. A drain extension region and a source extension region respectively separate the drain region and the source region from the gate dielectric layer.
Public/Granted literature
- US20220352152A1 RECESSED GATE FOR AN MV DEVICE Public/Granted day:2022-11-03
Information query
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