- Patent Title: Manufacturable thin film gallium and nitrogen containing devices
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Application No.: US17897765Application Date: 2022-08-29
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Publication No.: US11948980B1Publication Date: 2024-04-02
- Inventor: James W. Raring , Melvin McLaurin , Alexander Sztein , Po Shan Hsu
- Applicant: KYOCERA SLD Laser, Inc.
- Applicant Address: US CA Goleta
- Assignee: KYOCERA SLD Laser, Inc.
- Current Assignee: KYOCERA SLD Laser, Inc.
- Current Assignee Address: US CA Goleta
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L29/205
- IPC: H01L29/205 ; H01L21/02 ; H01L21/311 ; H01L21/683 ; H01L21/8252 ; H01L23/00 ; H01L27/06 ; H01L27/088 ; H01L27/12 ; H01L27/15 ; H01L29/66 ; H01L33/00 ; H01L33/06 ; H01L33/32 ; H01S5/02 ; H01S5/227 ; H01S5/343 ; H01L27/085 ; H01L29/423

Abstract:
A method for manufacturing a display panel comprising light emitting device including micro LEDs includes providing multiple donor wafers having a surface region and forming an epitaxial material overlying the surface region. The epitaxial material includes an n-type region, an active region comprising at least one light emitting layer overlying the n-type region, and a p-type region overlying the active layer region. The multiple donor wafers are configured to emit different color emissions. The epitaxial material on the multiple donor wafers is patterned to form a plurality of dice, characterized by a first pitch between a pair of dice less than a design width. At least some of the dice are selectively transferred from the multiple donor wafers to a common carrier wafer such that the carrier wafer is configured with different color emitting LEDs. The different color LEDs could comprise red-green-blue LEDs to form a RGB display panel.
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