Invention Grant
- Patent Title: Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
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Application No.: US18103812Application Date: 2023-01-31
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Publication No.: US11950384B2Publication Date: 2024-04-02
- Inventor: Akshay Gunaji , Uday Pai , Timothy J. Roggenbuck , Sanjeev Baluja , Kalesh Panchaxari Karadi , Tejas Ulavi
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: H05K5/02
- IPC: H05K5/02 ; C23C16/455 ; C23C16/458 ; H02G3/04

Abstract:
Process assemblies and cable management assemblies for managing cables in tight envelopes. A processing assembly includes a top chamber having at least one substrate support, a support shaft, a robot spindle assembly, a stator and a cable management system. The cable management system includes an inner trough assembly and an outer trough assembly configured to move relative to one another, and a plurality of chain links configured to house at least one cable for delivering power to the process assembly.
Public/Granted literature
- US20230175131A1 DYNAMIC ELECTRICAL AND FLUID DELIVERY SYSTEM WITH INDEXING MOTION FOR BATCH PROCESSING CHAMBERS Public/Granted day:2023-06-08
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