Invention Grant
- Patent Title: Three-dimensional semiconductor memory devices
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Application No.: US17143493Application Date: 2021-01-07
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Publication No.: US11950517B2Publication Date: 2024-04-02
- Inventor: Ilmok Park , Kyusul Park , Daehwan Kang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: HARNESS, DICKEY & PIERCE, P.L.C.
- Priority: KR 20200069815 2020.06.09
- Main IPC: H10N70/00
- IPC: H10N70/00 ; H10B63/00

Abstract:
A three-dimensional semiconductor memory device may include a first conductive line extending in a first direction, a second conductive line extending in a second direction crossing the first direction, a cell stack at an intersection of the first and second conductive lines, and a gapfill insulating pattern covering a side surface of the cell stack. The cell stack may include first, second, and third electrodes sequentially stacked, a switching pattern between the first and second electrodes, and a variable resistance pattern between the second and third electrodes. A top surface of the gapfill insulating pattern may be located between top and bottom surfaces of the third electrode.
Public/Granted literature
- US20210384427A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2021-12-09
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