Invention Grant
- Patent Title: Phase-change random access memory device and method of making the same
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Application No.: US17826350Application Date: 2022-05-27
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Publication No.: US11950518B2Publication Date: 2024-04-02
- Inventor: Jau-Yi Wu
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: The Marbury Law Group, PLLC
- Main IPC: H10N70/00
- IPC: H10N70/00 ; G11C13/00 ; H10B63/00 ; H10N70/20

Abstract:
A phase-change memory device and method of manufacturing the same, the memory device including: a substrate; a bottom electrode disposed over the substrate; a top electrode disposed over the bottom electrode; and a phase-change layer disposed between the top and bottom electrodes. The phase change layer includes a chalcogenide Ge—Sb—Te (GST) material that includes at least 30 at % Ge and that is doped with a dopant including N, Si, Sc, Ga, C, or any combination thereof.
Public/Granted literature
- US20220285613A1 PHASE-CHANGE RANDOM ACCESS MEMORY DEVICE AND METHOD OF MAKING THE SAME Public/Granted day:2022-09-08
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