Invention Grant
- Patent Title: Polishing pad, method for producing the same and method of fabricating semiconductor device using the same
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Application No.: US17520206Application Date: 2021-11-05
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Publication No.: US11951591B2Publication Date: 2024-04-09
- Inventor: Hye Young Heo , Jang Won Seo , Jae In Ahn , Jong Wook Yun
- Applicant: SK enpulse Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK ENPULSE CO., LTD.
- Current Assignee: SK ENPULSE CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: IP & T GROUP LLP
- Priority: KR 20200147984 2020.11.06 KR 20200147994 2020.11.06
- Main IPC: B24B37/26
- IPC: B24B37/26 ; B24B37/015 ; B24B37/20 ; B24B37/22

Abstract:
The present disclosure provides a polishing pad, which may maintain polishing performances required for a polishing process, such as a removal rate and a polishing profile, minimize defects that may occur on a wafer during the polishing process, and polish layers of different materials so as to have the same level of flatness even when the layers are polished at the same time, and a method for producing the polishing pad. In addition, according to the present disclosure, it is possible to determine a polishing pad, which shows an optimal removal rate selectivity along with excellent performance in a CMP process, through the physical property values of the polishing pad without a direct polishing test.
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