Invention Grant
- Patent Title: Micromechanical sensor device and corresponding manufacturing method
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Application No.: US17419511Application Date: 2020-02-05
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Publication No.: US11952263B2Publication Date: 2024-04-09
- Inventor: Mike Schwarz , Pascal Gieschke , Valentina Kramer-Sinzinger
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: NORTON ROSE FULBRIGHT US LLP
- Agent Gerard A. Messina
- Priority: DE 2019201768.1 2019.02.12
- International Application: PCT/EP2020/052848 2020.02.05
- International Announcement: WO2020/164988A 2020.08.20
- Date entered country: 2021-06-29
- Main IPC: B81B3/00
- IPC: B81B3/00

Abstract:
A micromechanical sensor device and manufacturing method. The micromechanical sensor device is provided with a cap substrate, which has a first front side and a first back side, and which has a through-opening as a media entry region; and with a sensor substrate, which has a second front side and a second back side, and which has, on the second front side, a sensor region that is embedded in an island-like region suspended on the remaining sensor substrate. The island-like region is mechanically decoupled from the remaining sensor substrate by a lateral stress-relief trench and by a cavity situated in the sensor substrate, underneath the island-like region. The first back side is bonded to the second front side so that the through opening is situated above the sensor region. The sensor region is covered by a gel, which fills the through-opening and the stress-relief trench at least partially.
Public/Granted literature
- US20220081281A1 MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD Public/Granted day:2022-03-17
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