Invention Grant
- Patent Title: Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films
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Application No.: US17036193Application Date: 2020-09-29
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Publication No.: US11952465B2Publication Date: 2024-04-09
- Inventor: Manchao Xiao , Matthew R. MacDonald , Xinjian Lei , Meiliang Wang
- Applicant: Versum Materials US, LLC
- Applicant Address: US AZ Tempe
- Assignee: VERSUM MATERIALS US, LLC
- Current Assignee: VERSUM MATERIALS US, LLC
- Current Assignee Address: US AZ Tempe
- Agent David K. Benson
- The original application number of the division: US15883815 2018.01.30
- Main IPC: C08G77/26
- IPC: C08G77/26 ; C07F7/10 ; C07F7/18 ; C07F7/21 ; C08G77/04 ; C08G77/06 ; C08L83/08 ; C23C16/40 ; C23C16/455
Abstract:
Amino-functionalized linear and cyclic oligosiloxanes, which have at least two silicon and two oxygen atoms as well as an organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized linear and cyclic oligosiloxanes are also disclosed.
Public/Granted literature
- US20210017339A1 Organoamino-Functionalized Linear And Cyclic Oligosiloxanes For Deposition Of Silicon-Containing Films Public/Granted day:2021-01-21
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