Invention Grant
- Patent Title: Oscillator apparatus
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Application No.: US17487256Application Date: 2021-09-28
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Publication No.: US11953417B2Publication Date: 2024-04-09
- Inventor: John D. Kim , Flavio Pardo , Sina Moradian
- Applicant: Nokia Technologies Oy
- Applicant Address: FI Espoo
- Assignee: Nokia Technologies Oy
- Current Assignee: Nokia Technologies Oy
- Current Assignee Address: FI Espoo
- Agency: Nokia Technologies Oy
- Priority: EP 199377 2020.09.30
- Main IPC: G01N15/06
- IPC: G01N15/06 ; H03B5/32 ; H10N30/87
Abstract:
An apparatus comprising,
a monolithic crystal comprising a substrate portion and at least one oscillator;
a first electrode provided at a first location of the oscillator;
a second electrode provided at a second location of the oscillator;
a gap separating the oscillator from the substrate portion, exposing a side surface of the oscillator; and
one or more tethers that extend across the gap so that the oscillator is supported by the substrate portion.
a monolithic crystal comprising a substrate portion and at least one oscillator;
a first electrode provided at a first location of the oscillator;
a second electrode provided at a second location of the oscillator;
a gap separating the oscillator from the substrate portion, exposing a side surface of the oscillator; and
one or more tethers that extend across the gap so that the oscillator is supported by the substrate portion.
Public/Granted literature
- US20220099549A1 OSCILLATOR APPARATUS Public/Granted day:2022-03-31
Information query
