Invention Grant
- Patent Title: Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics
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Application No.: US18134671Application Date: 2023-04-14
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Publication No.: US11953813B2Publication Date: 2024-04-09
- Inventor: Nicolo' Boni , Roberto Carminati , Massimiliano Merli
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy LLC
- Priority: IT 2018000011112 2018.12.14 EP 165958 2019.03.28
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00 ; G02B26/10 ; G03B21/00 ; G03B21/28

Abstract:
Disclosed herein is a microelectromechanical device that features a fixed structure defining a cavity, a tiltable structure elastically suspended within the cavity, and a piezoelectrically driven actuation structure that rotates the tiltable structure about a first rotation axis. The actuation structure includes driving arms with piezoelectric material, elastically coupled to the tiltable structure by decoupling elastic elements that are stiff to out-of-plane movements but compliant to torsional movements. The tiltable structure is elastically coupled to the fixed structure at the first rotation axis using elastic suspension elements, while the fixed structure forms a frame surrounding the cavity with supporting elements. A lever mechanism is coupled between a supporting element and a driving arm.
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