Invention Grant
- Patent Title: Transport system having a magnetically levitated transportation stage
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Application No.: US17653661Application Date: 2022-03-07
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Publication No.: US11953836B2Publication Date: 2024-04-09
- Inventor: Lei Zhou , David L. Trumper , Ruvinda Gunawardana
- Applicant: Massachusetts Institute of Technology , ASML Netherlands B.V.
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology,ASML Netherlands B.V.
- Current Assignee: Massachusetts Institute of Technology,ASML Netherlands B.V.
- Current Assignee Address: US MA Cambridge; NL AH Veldhoven
- Agency: Daly, Crowley, Mofford & Durkee, LLP
- The original application number of the division: US16490206
- Main IPC: G03F7/00
- IPC: G03F7/00 ; H02K41/03
Abstract:
A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.
Public/Granted literature
- US20220187720A1 Transport System Having a Magnetically Levitated Transportation Stage Public/Granted day:2022-06-16
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