Invention Grant
- Patent Title: Fluid control device, fluid control system, storage medium storing a program for fluid control device, and fluid control method
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Application No.: US17847822Application Date: 2022-06-23
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Publication No.: US11953924B2Publication Date: 2024-04-09
- Inventor: Sota Matsumoto , Kentaro Nagai , Yosuke Hisamori , Kazuhiro Matsuura
- Applicant: HORIBA STEC, Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Alleman Hall & Tuttle LLP
- Priority: JP 21105441 2021.06.25 JP 21209344 2021.12.23
- Main IPC: G05D7/06
- IPC: G05D7/06 ; F17D3/01 ; G01F1/36 ; G01F15/00

Abstract:
In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.
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