Invention Grant
- Patent Title: Control circuit, pulsed power supply system, and semiconductor processing equipment
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Application No.: US17786429Application Date: 2020-12-17
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Publication No.: US11955313B2Publication Date: 2024-04-09
- Inventor: Gang Wei
- Applicant: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Current Assignee: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: ANOVA LAW GROUP, PLLC
- Priority: CN 1911310564.4 2019.12.18
- International Application: PCT/CN2020/137126 2020.12.17
- International Announcement: WO2021/121304A 2021.06.24
- Date entered country: 2022-06-16
- Main IPC: H02M3/155
- IPC: H02M3/155 ; H01J37/32

Abstract:
A control circuit for outputting a pulsed signal includes a switch circuit having a first terminal, a second terminal, a third terminal, a fourth terminal, a first control terminal, and a second control terminal, where the first terminal and the second terminal input the DC signal, the third terminal and the fourth terminal output the pulsed signal, the third terminal and the fourth terminal output the pulsed signal in response to the first control terminal and the second control terminal receiving the first signal, and stop outputting the pulsed signal in response to the first control terminal and the second control terminal receiving the second signal; and an energy storage circuit having two terminals connected to the first terminal and the second terminal of the switch circuit to store residual electric energy of the switch circuit when the switch circuit does not output the pulsed signal.
Public/Granted literature
- US20230023621A1 CONTROL CIRCUIT, PULSED POWER SUPPLY SYSTEM, AND SEMICONDUCTOR PROCESSING EQUIPMENT Public/Granted day:2023-01-26
Information query
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