Invention Grant
- Patent Title: Ceramic susceptor
-
Application No.: US17659832Application Date: 2022-04-19
-
Publication No.: US11955320B2Publication Date: 2024-04-09
- Inventor: Ju Sung Lee , Haneum Bae
- Applicant: MICO CERAMICS LTD.
- Applicant Address: KR Anseong-si
- Assignee: MICO CERAMICS LTD.
- Current Assignee: MICO CERAMICS LTD.
- Current Assignee Address: KR Anseong-si
- Agency: BROADVIEW IP LAW, PC
- Priority: KR 20200188893 2020.12.31
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C23C16/458 ; C23C16/52 ; H01J37/32 ; H01T23/00

Abstract:
The present disclosure relates to a ceramic susceptor. The ceramic susceptor of the present disclosure includes: an insulating plate on which a high-frequency electrode is disposed; a shaft connected to the insulating plate; a connection mount connected to a longitudinal end of the shaft; a first rod and a second rod, which are connected to the high-frequency electrode, pass through the longitudinal end of the shaft, and extend to the connection mount; and a connection member disposed in the connection mount, wherein the connection member connects the first rod to the second rod.
Public/Granted literature
- US11908667B2 Ceramic susceptor Public/Granted day:2024-02-20
Information query
IPC分类: