• Patent Title: Cooling water circulation system-integrated by-product collection apparatus
  • Application No.: US17257401
    Application Date: 2020-12-02
  • Publication No.: US11955351B2
    Publication Date: 2024-04-09
  • Inventor: Seungyong Lee
  • Applicant: J-SOLUTION CO., LTD.
  • Applicant Address: KR Yongin-si
  • Assignee: J-SOLUTION CO., LTD.
  • Current Assignee: J-SOLUTION CO., LTD.
  • Current Assignee Address: KR Yongin-si
  • Agency: Paratus Law Group, PLLC
  • Priority: KR 20190161658 2019.12.06
  • International Application: PCT/KR2020/017495 2020.12.02
  • International Announcement: WO2021/112569A 2021.06.10
  • Date entered country: 2020-12-31
  • Main IPC: B01D53/22
  • IPC: B01D53/22 H01L21/67
Cooling water circulation system-integrated by-product collection apparatus
Abstract:
Disclosed is a by-product collection apparatus which collects a by-product generated during a manufacturing process of manufacturing a semiconductor or a semiconductor-like product. The apparatus includes: a by-product collection module connected to a pipeline in series and configured to collect a by-product from a by-product gas, wherein the by-product gas flows in the pipeline having an inlet pipe and an outlet pipe provided at upper and lower portions of a first casing; and a cooling water supply module including a cooling water tank and a cooling water pump in a second casing and configured to supply and recover cooling water to and from the by-product collection module through a cooling pipe.
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