Invention Grant
- Patent Title: Cooling water circulation system-integrated by-product collection apparatus
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Application No.: US17257401Application Date: 2020-12-02
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Publication No.: US11955351B2Publication Date: 2024-04-09
- Inventor: Seungyong Lee
- Applicant: J-SOLUTION CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: J-SOLUTION CO., LTD.
- Current Assignee: J-SOLUTION CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: Paratus Law Group, PLLC
- Priority: KR 20190161658 2019.12.06
- International Application: PCT/KR2020/017495 2020.12.02
- International Announcement: WO2021/112569A 2021.06.10
- Date entered country: 2020-12-31
- Main IPC: B01D53/22
- IPC: B01D53/22 ; H01L21/67

Abstract:
Disclosed is a by-product collection apparatus which collects a by-product generated during a manufacturing process of manufacturing a semiconductor or a semiconductor-like product. The apparatus includes: a by-product collection module connected to a pipeline in series and configured to collect a by-product from a by-product gas, wherein the by-product gas flows in the pipeline having an inlet pipe and an outlet pipe provided at upper and lower portions of a first casing; and a cooling water supply module including a cooling water tank and a cooling water pump in a second casing and configured to supply and recover cooling water to and from the by-product collection module through a cooling pipe.
Public/Granted literature
- US20210366734A1 COOLING WATER CIRCULATION SYSTEM-INTEGRATED BY-PRODUCT COLLECTION APPARATUS Public/Granted day:2021-11-25
Information query
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