- Patent Title: Model-based failure mitigation for semiconductor processing systems
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Application No.: US17484888Application Date: 2021-09-24
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Publication No.: US11955358B2Publication Date: 2024-04-09
- Inventor: Anshul Ashok Vyas , Liem Ferryanto , Binbin Wang , Ravi C. Edupuganti
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: C23C16/52
- IPC: C23C16/52 ; G05B19/418 ; H01L21/66 ; H01L21/67
Abstract:
A method of detecting failure causes in semiconductor processing systems may include receiving an indication of a failure in a semiconductor processing system and providing the indication of the failure as a query to a network representing the semiconductor processing system. The network may include nodes representing on-wafer effects and component functions, and relationships between the nodes that represent causal dependencies between the component functions and the on-wafer effects. The method may also include calculating a change in probabilities assigned to nodes representing the component functions resulting from the query, and generating an output indicating a probability of at least one of the component functions as a cause of the failure.
Public/Granted literature
- US20230096518A1 MODEL-BASED FAILURE MITIGATION FOR SEMICONDUCTOR PROCESSING SYSTEMS Public/Granted day:2023-03-30
Information query
IPC分类:
