Invention Grant
- Patent Title: Bonding method of package components and bonding apparatus
-
Application No.: US17876556Application Date: 2022-07-29
-
Publication No.: US11955378B2Publication Date: 2024-04-09
- Inventor: Yi-Li Hsiao , Chih-Hang Tung , Chen-Hua Yu , Tung-Liang Shao , Su-Chun Yang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- The original application number of the division: US16866565 2020.05.05
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/50 ; H01L21/60

Abstract:
A bonding method of package components and a bonding apparatus are provided. The method includes: providing at least one first package component and a second package component, wherein the at least one first package component has first electrical connectors and a first dielectric layer at a bonding surface of the at least one first package component, and the second package component has second electrical connectors and a second dielectric layer at a bonding surface of the second package component; bringing the at least one first package component and the second package component in contact, such that the first electrical connectors approximate or contact the second electrical connectors; and selectively heating the first electrical connectors and the second electrical connectors by electromagnetic induction, in order to bond the first electrical connectors with the second electrical connectors.
Public/Granted literature
- US20220367255A1 BONDING METHOD OF PACKAGE COMPONENTS AND BONDING APPARATUS Public/Granted day:2022-11-17
Information query
IPC分类: