Invention Grant
- Patent Title: Flip chip package structure and manufacturing method thereof
-
Application No.: US17674312Application Date: 2022-02-17
-
Publication No.: US11955443B2Publication Date: 2024-04-09
- Inventor: Shiann-Tsong Tsai , Yang-Ming Shih , Hung-Yun Hsu
- Applicant: AMAZING COOL TECHNOLOGY CORP.
- Applicant Address: TW Taipei
- Assignee: AMAZING COOL TECHNOLOGY CORP.
- Current Assignee: AMAZING COOL TECHNOLOGY CORP.
- Current Assignee Address: TW Taipei
- Agency: HDLS IPR SERVICES
- Agent Chun-Ming Shih
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A manufacturing method of a flip chip package structure is provided and has following steps: providing at least one silicon substrate having a connecting surface and at least one conductive base attached to the connecting surface; arranging a graphene copper layer covering the conductive base; laminating a photoresist layer on the connecting surface, etching the photoresist layer to form a cavity corresponding to the conductive base, and a portion of the graphene copper layer corresponding to the conductive base being exposed on a bottom of the cavity; electroplating a copper material on the graphene copper layer, and the copper material being accumulated in the cavity to form a copper pillar; removing the photoresist layer and the graphene copper layer covered by the photoresist layer.
Public/Granted literature
- US20230260936A1 FLIP CHIP PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2023-08-17
Information query
IPC分类: