Invention Grant
- Patent Title: Field-effect transistors with a gate structure in a dual-depth trench isolation structure
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Application No.: US17335093Application Date: 2021-06-01
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Publication No.: US11955514B2Publication Date: 2024-04-09
- Inventor: Bong Woong Mun , Jeoung Mo Koo
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agent David Cain
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/66 ; H01L29/78

Abstract:
The embodiments herein relate to field-effect transistors (FETs) with a gate structure in a dual-depth trench isolation structure and methods of forming the same. The FET includes a substrate having an upper surface, a trench isolation structure, and a gate structure adjacent to the trench isolation structure. The trench isolation structure has a first portion having a lower surface and a second portion having a lower surface in the substrate; the lower surface of the first portion is above the lower surface of the second portion.
Public/Granted literature
- US20220384571A1 FIELD-EFFECT TRANSISTORS WITH A GATE STRUCTURE IN A DUAL-DEPTH TRENCH ISOLATION STRUCTURE Public/Granted day:2022-12-01
Information query
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