Invention Grant
- Patent Title: Method for manufacturing a semiconductor device
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Application No.: US18102204Application Date: 2023-01-27
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Publication No.: US11955516B2Publication Date: 2024-04-09
- Inventor: Ho-Jun Kim , Woong Sik Nam , Mirco Cantoro
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Fish & Richardson P.C.
- Priority: KR 20200139044 2020.10.26
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/8234 ; H01L29/423 ; H01L29/66

Abstract:
A semiconductor device includes first and second active patterns, a field insulating film between the first and second active patterns, a first gate structure intersecting the first active pattern and including a first gate electrode and a first gate spacer, a second gate structure intersecting the second active pattern and including a second gate electrode and a second gate spacer, a gate separation structure on the field insulating film between the first and second gate structures, the gate separation structure including a gate separation filling film on a gate separation liner, and a connecting spacer between the gate separation structure and the field insulating film, the connecting spacer protruding from a top surface of the field insulating film, and the gate separation liner contacting the connecting spacer and extending along a top surface and sidewalls of the connecting spacer and along the top surface of the field insulating film.
Public/Granted literature
- US20230163171A1 METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE Public/Granted day:2023-05-25
Information query
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