Invention Grant
- Patent Title: Methods of forming FinFET devices
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Application No.: US17963196Application Date: 2022-10-11
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Publication No.: US11955528B2Publication Date: 2024-04-09
- Inventor: Hsin-Yi Lee , Cheng-Lung Hung , Weng Chang , Chi-On Chui
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- The original application number of the division: US16741767 2020.01.14
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L21/28 ; H01L21/285 ; H01L21/8238 ; H01L27/092 ; H01L29/06 ; H01L29/51 ; H01L29/66 ; H01L29/78

Abstract:
Semiconductor devices, FinFET devices and methods of forming the same are disclosed. One of the semiconductor devices includes a substrate and a gate strip disposed over the substrate. The gate strip includes a high-k layer disposed over the substrate, an N-type work function metal layer disposed over the high-k layer, and a barrier layer disposed over the N-type work function metal layer. The barrier layer includes at least one first film containing TiAlN, TaAlN or AlN.
Public/Granted literature
- US20230032727A1 METHODS OF FORMING FINFET DEVICES Public/Granted day:2023-02-02
Information query
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