Invention Grant
- Patent Title: Method for coating chips
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Application No.: US17435102Application Date: 2020-03-02
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Publication No.: US11955585B2Publication Date: 2024-04-09
- Inventor: Aurélien Suhm , Maxime Argoud
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR 02486 2019.03.12
- International Application: PCT/FR2020/050410 2020.03.02
- International Announcement: WO2020/183090A 2020.09.17
- Date entered country: 2021-08-31
- Main IPC: H01L33/44
- IPC: H01L33/44 ; G03F7/11 ; G03F7/16

Abstract:
A method for coating chips resting, by a rear face opposite to a front face, on a main face of a support substrate, and separated from each other by an inter-chip space, includes a step of forming a photosensitive coating film covering the front faces and the inter-chip spaces. The method further includes a first photolithographic sequence which comprises an insolation sub-step, and a dissolution sub-step. The sequence leads to a partial removal of the photosensitive coating film so as to maintain the film exclusively at the inter-chip spaces and, advantageously recessed relative to the front faces.
Public/Granted literature
- US20220149245A1 METHOD FOR COATING CHIPS Public/Granted day:2022-05-12
Information query
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