Invention Grant
- Patent Title: 3-dimensional NAND flash memory device, method of fabricating the same, and method of driving the same
-
Application No.: US17877118Application Date: 2022-07-29
-
Publication No.: US11956963B2Publication Date: 2024-04-09
- Inventor: Woo Young Choi
- Applicant: SK hynix Inc. , SOGANG UNIVERSITY RESEARCH FOUNDATION
- Applicant Address: KR Icheon
- Assignee: SK hynix Inc.,SOGANG UNIVERSITY RESEARCH FOUNDATION
- Current Assignee: SK hynix Inc.,SOGANG UNIVERSITY RESEARCH FOUNDATION
- Current Assignee Address: KR Icheon; KR Seoul
- Priority: KR 20200031945 2020.03.16
- The original application number of the division: US17203352 2021.03.16
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L21/28 ; H01L21/3105 ; H01L29/40 ; H01L29/423 ; H10B43/27

Abstract:
A 3-dimensional flash memory device and methods of fabricating and driving the same are provided. The device includes: a channel layer extending over a substrate in a first direction perpendicular to a surface of the substrate; an information storing layer extending along a sidewall of the channel layer in the first direction; control gates each surrounding the channel layer, with the information storing layer between the channel layer and the control gates; an insulating layer being between the control gates in the first direction and separating the control gates from each other; a fixed charge region disposed at an interface of the insulating layer and the information storing layer or in a portion of the information storing layer between the control gates in the first direction; and a doped region induced by the fixed charge region and disposed at a surface of the channel layer facing the fixed charge region.
Public/Granted literature
- US20220384481A1 3-DIMENSIONAL NAND FLASH MEMORY DEVICE, METHOD OF FABRICATING THE SAME, AND METHOD OF DRIVING THE SAME Public/Granted day:2022-12-01
Information query
IPC分类: