- Patent Title: Contact resistance of a metal liner in a phase change memory cell
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Application No.: US17451861Application Date: 2021-10-22
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Publication No.: US11957069B2Publication Date: 2024-04-09
- Inventor: Injo Ok , Oleg Gluschenkov , Alexander Reznicek , Soon-Cheon Seo
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Edward J. Wixted, III
- Main IPC: G11C11/00
- IPC: G11C11/00 ; H10B63/00 ; H10N70/00 ; H10N70/20

Abstract:
An approach to provide a semiconductor structure for a phase change memory cell with a first liner material surrounding a sidewall of a hole in a dielectric material where the hole in the dielectric is on a bottom electrode in the dielectric material. The semiconductor structure includes a layer of a second liner material on the first liner material, where the second liner material has an improved contact resistance to a phase change material. The semiconductor structure includes the phase change material abutting the layer of the second liner material on the first liner material. The phase change material fills the hole in the dielectric material. The second liner material that is between the phase change material and the first liner material provides a lower contact resistivity with the phase change material in the crystalline phase than the first liner material.
Public/Granted literature
- US20230129619A1 CONTACT RESISTANCE OF A METAL LINER IN A PHASE CHANGE MEMORY CELL Public/Granted day:2023-04-27
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