Invention Grant
- Patent Title: Polishing apparatus having surface-property measuring device of polishing pad and polishing system
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Application No.: US17048674Application Date: 2019-04-25
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Publication No.: US11958161B2Publication Date: 2024-04-16
- Inventor: Keisuke Kamiki , Toru Maruyama , Yasuyuki Motoshima
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: PEARNE & GORDON LLP
- Priority: JP 18085143 2018.04.26 JP 19071994 2019.04.04
- International Application: PCT/JP2019/017691 2019.04.25
- International Announcement: WO2019/208712A 2019.10.31
- Date entered country: 2020-10-19
- Main IPC: B24B37/005
- IPC: B24B37/005

Abstract:
The present invention relates to a polishing apparatus having a surface-property measuring device for measuring surface properties of a polishing pad which is used to polish a substrate, such as semiconductor wafer, and a polishing system including such a polishing apparatus. The polishing apparatus includes a surface-property measuring device (30) for measuring surface properties of a polishing pad (2), a support arm (50) for supporting the surface-property measuring device (30), and a moving unit (53) coupled to the support arm (50) and configured to move the surface-property measuring device (30) from a retreat position to a measure position.
Public/Granted literature
- US20210370461A1 POLISHING APPARATUS HAVING SURFACE-PROPERTY MEASURING DEVICE OF POLISHING PAD AND POLISHING SYSTEM Public/Granted day:2021-12-02
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