Invention Grant
- Patent Title: Method for ablating or roughening wafer surfaces
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Application No.: US17188985Application Date: 2021-03-01
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Publication No.: US11958739B2Publication Date: 2024-04-16
- Inventor: Jason Rodger Dwyer , Y. M. Nuwan D. Y. Bandara , Brian Sheetz
- Applicant: University of Rhode Island Board of Trustees
- Applicant Address: US RI Kingston
- Assignee: University of Rhode Island Board of Trustees
- Current Assignee: University of Rhode Island Board of Trustees
- Current Assignee Address: US RI Kingston
- Agency: Milstein Zhang & Wu LLC Duan Wu, Esq.
- Main IPC: B81C1/00
- IPC: B81C1/00

Abstract:
The present invention provides a simple method for ablating a protective thin film on a bulk surface and roughening the underlying bulk. In an embodiment, silicon nitride thin films, which are useful as etch-stop masks in micro- and nano-fabrication, is removed from a silicon wafer's surface using a hand-held “flameless” Tesla-coil lighter. Vias created by a spatially localized electron beam from the lighter allow a practitioner to perform micro- and nano-fabrication without the conventional steps of needing a photoresist and photolithography. Patterning could be achieved with a hard mask or rastering of the spatially confined discharge, offering—with low barriers to rapid use—particular capabilities that might otherwise be out of reach to researchers without access to conventional, instrumentation-intensive micro- and nano-fabrication workflows.
Public/Granted literature
- US20210269304A1 Method for Ablating or Roughening Wafer Surfaces Public/Granted day:2021-09-02
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